Solution for Precision Motion and Positioning

PI is a worldwide leading supplier of solutions in the fields of motion and positioning.

PI does not only develop and produce a broad range of positioning stages and actuators for linear, rotary and vertical motion or combinations of different axes. PI also adapts those solutions to customer-specific applications or supplies finished subsystems for motion and positioning.

The control is an important system component and is also supplied by PI. This not only provides sophisticated control concepts but also the hardware and software interfaces for the application environment.

HARDWARE

Compact Rotation Stage

Large Clear Aperture

DT-80

Unlimited travel range
Repeatability to 175 μrad
Maximum velocity 40°/s
Reference switch

Details

Precision-class rotation stage

Worm drive with high gear ratio for precision positioning. Large aperture with 40 mm Ø. Mechanical reference switch.

Drive types

DC servo motor with rotary encoder on the motor shaft
Stepper motor

Application fields

Precision microassembly. Research. Automation.

Compact Linear Stage

XY(Z) Combinations with a Variety of Drives and Travel Ranges

M-110 • M-111 • M-112

Very compact due to folded drive
Stepper motors and closed-loop DC motors
Noncontact reference and limit switches
XY setups can be mounted directly
Larger quantities available quickly
Variants suitable for vacuum available

Details

Compact linear stage, versatile in use

Linear stage with compact size due to folded drive with belt drive. Clear aperture with 10 mm Ø. XY setups can be mounted directly without adapter plate.

Drive

2-phase stepper motor or closed-loop DC gear motor
Backlash-compensated leadscrew or ball screw

Position measuring

Variants with DC gear motor: Rotary encoder on the motor shaft
Noncontact Hall effect reference and limit switches

Application fields

Precision microassembly. Research. Laser marking. Automation. Optical alignment.

Linear Stage

Inexpensive, Reliable, Precise

M-403

Inexpensive cost-optimized design for
precise positioning
Travel ranges from 25 mm to 200 mm
Resolution to 0.018 μm
Min. incremental motion to 0.2 μm
Preloaded precision leadscrew
Heavier loads with M-413 and M-414

Details

Application fields

Measuring technology. Alignment.

PICA Shear Actuators

Compact Multi-Axis Actuators

P-111 – P-153

Single and multi-axis versions
Travel ranges to 10 × 10 × 10 μm
Extreme reliability: >109 cycles
Picometer resolution
Short lead times

Details

Piezo shear actuators

Operating voltage -250 to 250 V. Lateral displacement is based on the piezoelectric shear effect. Excellent dynamics with minimum electric power requirement. Variants with inner hole or for use in cryogenic and UHV environments to 10-9 hPa.

Possible modifications

Piezo ceramic material
Nonmagnetic versions
Operating voltage range, displacement, layer thickness, cross-sectional dimension
Load capacity, force generation
Mechanical interfaces: flat, spherical, metal, ceramic, glass, sapphire, etc.
Extra-tight length tolerances

Fields of application

Industry and research
Scanning applications
Microscopy
Precision mechanics
Switching applications

PIFOC Objective Scanner with Long Travel Range

High-Precision Positioner and Scanner for Microscope Objectives

P-725

Travel ranges to 460 μm
Significantly faster response and higher lifetime than motorized drives
Fine positioning of objectives with sub-nm resolution
Direct position measuring with capacitive sensors: Highest linearity
Zero-play, high-precision flexure guide system for better focus stability
Compatible with MetaMorph imaging software
Outstanding lifetime due to PICMA® piezo actuators
Clear aperture up to Ø 29 mm

Details

Application fields

Super-resolution microscopy
Light disc microscopy
Confocal microscopy
3-D imaging
Screening
Interferometry
Measuring technology
Autofocus systems
Biotechnology
Semiconductor tests

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Q-Motion® Precision Linear Stage

High Forces and Small Design Due to Piezo Motors

Q-545

Only 45 mm in width
Drive force 7 N
Incremental sensors with nanometer position resolution
XY combinations without adapter plate possible

Details

Piezoelectric inertia drive

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 6 mm/s.

Direct-measuring principle

The linear stages are equipped with a noncontact measuring optical linear encoder and a reference switch. Resolution 1 nm.

Application fields

Microassembly. Photonics. Optical alignment. Microscopy. Beamline instrumentation. Semiconductor technology. Testing.

PILine® Rotation Stage

Miniature Stage with Ultrasonic Piezo Motor

U-622

Extremely space-saving: Edge length only
20 mm, height 10 mm
Positions small loads quickly and with precision: Velocity to 720 °/s, minimum incremental motion to 525 μrad
Unlimited rotation range >360°
Drive torque 5 mNm
Self-locking when switched off: Saves energy and reduces generation of heat
Light and low noise

Details

Precision-class rotation stage

PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the selflocking drive holds the position of the stage mechanically stable. Energy consumption and heat generation are therefore considerably reduced. Applications with a low duty cycle that are battery-powered or heat-sensitive benefit from these characteristics. The position of the axis is measured by an encoder and an optical reference switch allows reliable repeatable motion. The piezomotor drive principle and its electrical operation are inexpensive and can be customized.

PILine® ultrasonic piezomotor

An integral part of a PILine® ultrasonic piezomotor is a piezo actuator that is preloaded against a movable, guided runner via a coupling element. The piezoceramic actuator is excited to ultrasonic oscillation by a high-frequency AC voltage between 100 and 200 kHz. Deformation of the actuator leads to periodic diagonal motion of the coupling element relative to the runner. The feed created is a few nanometers per cycle; the high frequencies lead to the high velocities. Preloading the piezoceramic actuator against the runner ensures self-locking of the drive when at rest and switched off.

Highly accurate position measuring with incremental encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Fields of application

Micromanipulation, Automation, Biotechnology, Sample manipulation, Sample positioning, optical metrology

PILine® Rotation Stage

Miniature Stage with Ultrasonic Piezo Motor

U-624

Extremely space-saving: Edge length only 30 mm, height 12 mm
Positions small loads quickly and with precision: Velocity to 720 °/s, minimum incremental motion to 105 μrad
Unlimited rotation range >360°
Drive torque 10 mNm
Self-locking when switched off: Saves energy and reduces generation of heat
Light and low noise

Details

Precision-class rotation stage

PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the selflocking drive holds the position of the stage mechanically stable. Energy consumption and heat generation are therefore considerably reduced. Applications with a low duty cycle that are battery-powered or heat-sensitive benefit from these characteristics. The position of the axis is measured by an encoder and an optical reference switch allows reliable repeatable motion. The piezomotor drive principle and its electrical operation are inexpensive and can be customized.

PILine® ultrasonic piezomotor

An integral part of a PILine® ultrasonic piezomotor is a piezo actuator that is preloaded against a movable, guided runner via a coupling element. The piezoceramic actuator is excited to ultrasonic oscillation by a high-frequency AC voltage between 100 and 200 kHz. Deformation of the actuator leads to periodic diagonal motion of the coupling element relative to the runner. The feed created is a few nanometers per cycle; the high frequencies lead to the high velocities. Preloading the piezoceramic actuator against the runner ensures self-locking of the drive when at rest and switched off.

Highly accurate position measuring with incremental encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Fields of application

Micromanipulation, Automation, Biotechnology, Sample manipulation, Sample positioning, optical metrology

PILine® Rotation Stage

Miniature Stage with Ultrasonic Piezo Motor and Central Opening

U-628

Compact: Edge length 50 mm, height19 mm
Positions loads quickly and with precision:Velocity to 720 °/s, minimum incrementalmotion to 51 μrad
Unlimited rotation range >360°
Drive torque 25 mNm
Self-locking when switched off: Savesenergy and reduces generation of heat
Central aperture for more fields ofapplication

Details

Precision-class rotation stage

PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy consumption and heat generation are therefore considerably reduced. Applications with a low duty cycle that are battery-powered or heat-sensitive benefit from these characteristics. The position of the axis is measured by an encoder and an optical reference switch allows reliable repeatable motion. The piezomotor drive principle and its electrical operation are inexpensive and can be customized.

PILine® ultrasonic piezomotor

An integral part of a PILine® ultrasonic piezomotor is a piezo actuator that is preloaded against a movable, guided runner via a coupling element. The piezoceramic actuator is excited to ultrasonic oscillation by a high-frequency AC voltage between 100 and 200 kHz. Deformation of the actuator leads to periodic diagonal motion of the coupling element relative to the runner. The feed created is a few nanometers per cycle; the high frequencies lead to the high velocities. Preloading the piezoceramic actuator against the runner ensures self-locking of the drive when at rest and switched off.

Highly accurate position measuring with incremental encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play, or elastic deformation have no influence on the measurement.

Application fields

Micromanipulation, Automation, Biotechnology, Sample manipulation, Sample positioning, Applications with limited space, optical metrology, Vacuum applications to 10-6 hPa (optional)

Linear Stage

Basic Version for Universal Fields of Use

VT-80

Travel ranges from 25 to 300 mm (1 to 12")
Low profile, also for XY combinations
Max. velocity to 20 mm/s
Load capacity to 5 kg
Variants suitable for vacuum available

Details

Standard-class linear stage

Recirculating ball bearings and precision leadscrew for smooth and even feed. Stress-relieved aluminum base for highest stability. Mechanical limit switches.

XY combinations

XY combinations of VT-80 linear stages are possible without an adapter. The compact XY variant with 25 mm travel range per axis is available for both motor types as factory option (preassembled at the factory). All other travel range variants can be combined to XY combinations by the customer.

Drive types

Closed-loop DC motor with rotary encoder on the motor shaft
2-phase stepper motor for high torque even at low velocities and high resolution

Recirculating ball bearings

When carefully assembled, recirculating ball bearings are distinguished by a beneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. The moving part of the stages is supported by four preloaded linear ball bearing units which run on two guide rails. Each bearing unit is made up of two independent rows of circulating ball bearings.

Application fields

Positioning tasks with low duty cycle in industry and research.